Real Time ALD/MLD Sensor System ( QCM )
¡¤ ALD/MLD sensor system (only QCM) ¡¤ Products optimum designed to measure the mass change of the ALD/MLD ¡¤ QCM based real-time mass change monitoring system ¡¤ Good reproducibility in also long-term data measurement ¡¤ Measuring Interface and Synchronization with Deposition Controller ¡¤ Design of deposition controller according to order specification 

+ Deposition process In-Situ Motoring System





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