Real Time ALD/MLD Sensor System ( QCM )

· ALD/MLD sensor system (only QCM)

· Products optimum designed to measure the mass change of the ALD/MLD 

· QCM based real-time mass change monitoring system

· Good reproducibility in also long-term data measurement

· Measuring Interface and Synchronization with Deposition Controller

· Design of deposition controller according to order specification

 

 

 

 

 

 

 

 

 

 

+  Deposition process

 

In-Situ Motoring System